Dry vacuum pumping system
Leybold`s new Dryvac 501 Plus mobile dry vacuum pumping system is designed for use in Etch, TEOS, LTO, PECVD and other CVD applications. The 501 Plus dry pump can be easily removed for maintenance and features complete electrical controls, a frame-mounted Roots blower and a compact microprocessor–the Leybold Integrated Monitoring System (LIMS). The LIMS monitors dry pump water temperature, oil and gas purge pressure, blower oil pressure, and motor temperature. It maximizes pumping system uptime by providing real-time feedback on pump performance and alerts the user to potential problems before they occur. It operates in 50 Hz or 60 Hz with pumping speeds of 235 CFM and 280 CFM.
Leybold Vacuum Products Inc.