Dry vacuum pumping system

Dry vacuum pumping system

Leybold`s new Dryvac 501 Plus mobile dry vacuum pumping system is designed for use in Etch, TEOS, LTO, PECVD and other CVD applications. The 501 Plus dry pump can be easily removed for maintenance and features complete electrical controls, a frame-mounted Roots blower and a compact microprocessor–the Leybold Integrated Monitoring System (LIMS). The LIMS monitors dry pump water temperature, oil and gas purge pressure, blower oil pressure, and motor temperature. It maximizes pumping system uptime by providing real-time feedback on pump performance and alerts the user to potential problems before they occur. It operates in 50 Hz or 60 Hz with pumping speeds of 235 CFM and 280 CFM.

Leybold Vacuum Products Inc.

Export, PA

(800) 433-4021

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Edwards launches new vacuum pumps at SEMICON China 2016
03/15/2016Edwards announced the availability of two new vacuum pump product families at SEMICON China: the iXM Series for semiconductor etch and chemical v...
Low-outgassing Faraday Isolators to improve lifetime and reliability of optical systems
02/18/2016Qioptiq, an Excelitas Technologies company introduces the LINOS Low-outgassing Faraday Isolators, the first of th...
Versatile high throughput SEM from JEOL
11/04/2015JEOL's new JSM-IT100 is the latest addition to its InTouchScope Series of Scanning Electron Microscopes....