Granite offers high stability for Suss’ probers

March 7, 2001–Munich, Germany–Karl Suss recently added high stability wafer probe systems to its existing product portfolio. The platform, made of granite, enhances Suss’ submicron probing range capabilities because it makes the probers less sensitive to undesirable environmental influences such as noise and does not pick the vibrations up as much as aluminum and other metals. Suss acquired this key technology with its takeover of Munich-based K&W in October 2000.

“During chip failure analysis, probers must analyze structures below 1-micron so system stability is a crucial prerequisite for accurate measurement results,” says Dr. Claus Dietrich, international product manager for probe systems at Suss. “When employing atomic force microscopy (AFM), computer aided design navigation, or laser cutters, the smallest system vibrations can cause measurement deviations. Due to the high stability of the granite probers, such problems are eliminated.”

The main difference to common probe systems is the use of granite boards, which offer a highly rigid, even and precise base provide system stability. This is further ensured by the tool’s construction, which keeps the number of mechanical joints and elastic connections between the granite board and the measurement unit to a minimum. This eliminates another potential source of vibration. An additional feature of the system is its linear drive that enables highly accurate positioning of the measurement probes.

Suss will exhibit this new system alongside its existing product portfolio during SEMICON Europa in April 2001.


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