ATMI unveils process monitoring system

September 25, 2003 – ATMI Inc., Danbury, CT, has introduced an RFID-based process monitoring system for liquid materials in a fab, aimed at replacing similar barcode-based systems.

The NOWTrak automated critical materials management system identifies, tracks, and catalogs the materials, providing information such as warnings of misconnects and expiration dates. ATMI calculates that all of the system’s potential uses in a fab could translate into $1 million in savings/year.

The system is helping Infineon generate “detailed bottle-by-bottle data that prevented errors and helped to identify potential yield issues,” according to Marlene Strobl, Infineon principal engineer for lithography.


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