ASML inks another litho deal

November 25, 2003 – A week after announcing a similar partnership with Dainippon Screen, ASML NV, Veldhoven, The Netherlands, has signed a deal with Tokyo Electron Ltd. to link the companies’ lithography and track systems.

ASML will install TEL’s Clean Track line with its Twinscan system in Japan, Europe, and the US starting in “early 2004,” with volume shipments slated for 2H04.

In the deal with Dainippon, ASML projected equipment move-in for November 2003 and initial shipments by January 2004.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...
Radiant Vision Systems announces new automated visual inspection system
11/06/2017Radiant Vision Systems, a provider of high-resolution imaging solutions for automated visual analysis of devices and surfaces, an...
SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...