Micron, ASML MaskTools team for litho tools

September 15, 2004 – ASML MaskTools, Santa Clara, CA, and Micron Technology Inc., Boise, ID, have signed a multiyear deal to develop applications for resolution-enhancement techniques.

Under the deal, Micron will purchase ASML’s MaskWeaver for RET implementation and LithoCruiser for scanner optimization, and will supply ASML with high-end maskmaking and mask-characterization services to qualify ASML’s Twinscan ArF scanners for volume production at the 65nm and 45nm nodes.

Micron also has acquired a global license for ASML MaskTools’ IP for volume production in its fabs.

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