BOC Edwards announced today that it has received an order from Akrion for 19 additional chemical blend and delivery modules to support Goldfinger Mach2HP megasonic wafer cleaning tools at a major Asian fab. The equipment set has been designed and engineered to complement Akrion’s process equipment. The blend and delivery systems will be installed adjacent to the cleaning tools on the process floor, as well as in the sub-fab, and are designed to handle multiple chemistries for superior flexibility. Shipments will commence 4Q04.
“Previous experience working with Goldfinger cleaning tools helped us to meet this particular chemical management challenge,” said Clay Parker, president of the chemical management group at BOC Edwards. “Our blending technology enables the end user to capitalize on the strengths of the Mach2HP tool, and maximize return on investment.”
Equipped with MassFusion load cell-based blending technology, the chemical blend and delivery systems from BOC Edwards are flexible by design, and can accommodate precise adjustments in blend and flow parameters as processes develop.