Akrion’s Goldfinger Technologies selects BOC Edwards chemical blending systems to support wafer cleaning tools in Asia

BOC Edwards announced today that it has received an order from Akrion for 19 additional chemical blend and delivery modules to support Goldfinger Mach2HP megasonic wafer cleaning tools at a major Asian fab. The equipment set has been designed and engineered to complement Akrion’s process equipment. The blend and delivery systems will be installed adjacent to the cleaning tools on the process floor, as well as in the sub-fab, and are designed to handle multiple chemistries for superior flexibility. Shipments will commence 4Q04.

“Previous experience working with Goldfinger cleaning tools helped us to meet this particular chemical management challenge,” said Clay Parker, president of the chemical management group at BOC Edwards. “Our blending technology enables the end user to capitalize on the strengths of the Mach2HP tool, and maximize return on investment.”

Equipped with MassFusion load cell-based blending technology, the chemical blend and delivery systems from BOC Edwards are flexible by design, and can accommodate precise adjustments in blend and flow parameters as processes develop.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...
Pfeiffer Vacuum introduces HiPace 2800 turbopump for ion implantation applications
07/06/2016Pfeiffer Vacuum has introduced the HiPace 2800 IT turbopump that is designed for ion implantation applications....
NanoFocus AG introduces new inspection system for semiconductors industry
05/31/2016NanoFocus AG, the developer and manufacturer of optical 3D surface measuring technology, introduces the new measuring system µ...