New UV thermal processing platform

December 7, 2005 – At Semicon Japan, a new ultraviolet thermal processing platform from Novellus was introduced that blends industry-standard lamp-based UV light sources with the company’s multistation sequential processing architecture.

With transistor and interconnect fabrication applications that require 5-10 minutes of total annealing, the SOLA (sequentially optimized luminescent anneal) tool should deliver 20-40 wafers/hr proportional throughputs.

Based on the Vector platform, the 300mm tool features four stations through which each wafer passes in series (see figure). Multistation single-wafer processing in this manner averages nonuniformities within each station for improved within-wafer uniformity.

Each station allows for different temperatures, light frequencies, and lumen intensities to be set, so that multistep anneals can be performed even though the time at each station remains constant.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Edwards launches new vacuum pumps at SEMICON China 2016
03/15/2016Edwards announced the availability of two new vacuum pump product families at SEMICON China: the iXM Series for semiconductor etch and chemical v...
Low-outgassing Faraday Isolators to improve lifetime and reliability of optical systems
02/18/2016Qioptiq, an Excelitas Technologies company introduces the LINOS Low-outgassing Faraday Isolators, the first of th...
Versatile high throughput SEM from JEOL
11/04/2015JEOL's new JSM-IT100 is the latest addition to its InTouchScope Series of Scanning Electron Microscopes....