Tegal announces etch tool orders

Dec. 16, 2005 — Tegal Corp. (Nasdaq:TGAL), a designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, announced the sale of several 900 and 980ACS plasma etch systems to four different customers in the U.S. and Europe. The company said the total value of the orders was approximately $1.5 million.

Tegal says more than 1,500 of the 900 Series systems have been installed worldwide. They are used for etching a variety of films used to manufacture MEMS, silicon ICs, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.


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