E-beam litho firm adds NA presence

April 7, 2006 – Elionix Co. Ltd., a Japanese manufacturer of electron-beam lithography equipment, has signed a deal with SEMTech Solutions to sell its sub-10nm 3-beam systems in the North American market.

Elionix has more than 200 systems installed in Asia, but is new to the North American market, having just recently sold several systems here. The company provides tools for surface roughness measurement and 3D imaging systems, and a new line of nanoindenters for surface hardness measuring applications.

The Elionix product lines “fill an immediate need for many nanotechnology applications. The price and performance of their sub-10nm electron beam lithography systems exceeds anything that has currently been available to North American customers,” stated Gerry O’Loughlin, president of SEMTech Solutions.


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