Tokyo Electron acquires Epion Corp.

Jan. 10, 2007 — Tokyo Electron (TEL), the world’s second largest supplier of semiconductor production equipment, announced the company has acquired Epion Corporation, supplier of gas cluster ion beam (GCIB) technology for diverse semiconductor applications and emerging nanotechnology markets.

Epion’s GCIB is a highly versatile atomic-scale processing technique that is ideal for production applications where surface and film quality are crucial, the company said. Key applications for GCIB include etching, smoothing, doping and physical and chemical surface modification.

“As our customers continue to aggressively shrink geometries and adopt new materials and novel device structures, we believe Epion’s unique technology will find its way into several high volume production applications,” said Lou Steen, vice president of marketing for TEL US and newly-appointed president of TEL Epion, in a prepared statement. “We believe that TEL’s worldwide service and support organizations will greatly enhance customer satisfaction of Epion’s nFusion System and Ultra Trimmer products.”

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

New AFM with high definition electrical measurement capabilities
04/16/2015The Nano-Observer, designed by Concept Scientific Instruments, is ideal for current and future AFM research applications....
Thin wafer processing temporary bonding adhesive film for 3D wafer integration
03/24/2015 AI Technology, Inc (AIT) is the first known provider of a film format high temperature temporary bonding adhesive for thi...
Dramatic results achieved in cleaving glass using ultra-short pulsed lasers
03/11/2015ROFIN-SINAR, Inc. introduces the SmartCleave FI laser process and the MPS glass handling system for high speed and precise cl...