Tokyo Electron acquires Epion Corp.

Jan. 10, 2007 — Tokyo Electron (TEL), the world’s second largest supplier of semiconductor production equipment, announced the company has acquired Epion Corporation, supplier of gas cluster ion beam (GCIB) technology for diverse semiconductor applications and emerging nanotechnology markets.

Epion’s GCIB is a highly versatile atomic-scale processing technique that is ideal for production applications where surface and film quality are crucial, the company said. Key applications for GCIB include etching, smoothing, doping and physical and chemical surface modification.

“As our customers continue to aggressively shrink geometries and adopt new materials and novel device structures, we believe Epion’s unique technology will find its way into several high volume production applications,” said Lou Steen, vice president of marketing for TEL US and newly-appointed president of TEL Epion, in a prepared statement. “We believe that TEL’s worldwide service and support organizations will greatly enhance customer satisfaction of Epion’s nFusion System and Ultra Trimmer products.”

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>

NEW PRODUCTS

Dynaloy unveils safer cleaners
11/19/2014In response to evolving industry trends and customer preferences for products with better environmental, health, and safety (EHS) profiles, Dynaloy LLC is launching three...
Entegris' VaporSorb filter line protects advanced yield production
10/21/2014Entegris, Inc. today announced a new product for its VaporSorb line of airborne molecular contamination (AMC) filters. ...
Next-generation nanoimprint lithography technology
10/21/2014EV Group (EVG) today introduced its SmartNIL large-area nanoimprint lithography (NIL) process....