Epion Corp., Billerica, Mass. Undisclosed amount
Acquirer: Tokyo Electron (TEL)
Description: TEL acquired Epion, a supplier of gas cluster ion beam (GCIB) technology for diverse semiconductor applications and emerging nanotechnology markets because it considers Epion’s GCIB a highly versatile atomic-scale processing technique that is ideal for production applications where surface and film quality are crucial. Key applications for GCIB include etching, smoothing, doping, and physical and chemical surface modification.
AMIA Labs, Leesburg, Va. Undisclosed amount
Acquirer: Evans Analytical Group LLC
Description: AMIA provides x-ray based analytical services to high-tech industries, including x-ray diffraction, x-ray fluorescence, and x-ray reflectometry. AMIA has developed proprietary techniques for the measurement of texture, stress, composition and thickness on thin films, as well as micro-diffraction capabilities for patterned wafers or specific areas on medical implants and many other manufactured parts. The companies said AMIA operations and staff will be integrated into EAG’s Round Rock, Texas, facility.