ASML: i-Line customer topping 150WPH for 24hrs

September 12, 2007 – ASML says a Taiwanese customer achieved a record throughput using the company’s TwinScan XT:400F i-Line scanners — 150 wafers/hr for 24 hrs, producing nearly 3600 wafers in a single day earlier this spring.

The litho tool supplier cited Gartner managing VP Klaus Rinnen pointing out that i-Line is “an excellent technology for necessary, but less critical, 250nm chip features.”

The company said that it sold 30 of its 300mm i-Line tools in 1H07, more than in all of 2006, and later this year it plans to release an upgraded “XT:400G” model with 10% higher productivity.


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