ASML: i-Line customer topping 150WPH for 24hrs

September 12, 2007 – ASML says a Taiwanese customer achieved a record throughput using the company’s TwinScan XT:400F i-Line scanners — 150 wafers/hr for 24 hrs, producing nearly 3600 wafers in a single day earlier this spring.

The litho tool supplier cited Gartner managing VP Klaus Rinnen pointing out that i-Line is “an excellent technology for necessary, but less critical, 250nm chip features.”

The company said that it sold 30 of its 300mm i-Line tools in 1H07, more than in all of 2006, and later this year it plans to release an upgraded “XT:400G” model with 10% higher productivity.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...
Radiant Vision Systems announces new automated visual inspection system
11/06/2017Radiant Vision Systems, a provider of high-resolution imaging solutions for automated visual analysis of devices and surfaces, an...
SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...