ASML, Zeiss, Canon licensing litho tool IP

December 21, 2007 – ASML and Carl Zeiss SMT say they have agreed to cross-license patents with Canon in their respective fields of semiconductor lithography and optical components, meaning they can market products using technology covered by the others’ litho equipment-related patents.

The firms say the cross-license, which involves no technology transfers, will help them “compete more freely” in areas of technology and implementation, “rather than on IP rights.” ASML and Zeiss said in a statement that they will continue to invest in R&D and building up their own know-how and IP.


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