New tool set adds NIL capability to SUSS mask aligners

March 7, 2008 — SUSS MicroTec, toolmaker for MEMS, 3D/nano semiconductor, and advanced packaging development and manufacturing, has launched an “advanced nanotechnology” tool set for its mask aligners. The new nanoimprint lithography (NIL) tool enables SUSS aligners to print resist thicknesses from less than 100 nanometers to a few hundred microns with a printing resolution down to a few nanometers.

SUSS explains that UV-NIL, a low-cost production technology based on UV-curing, has been developed as a cost-effective alternative to high-resolution e-beam lithography to print sub-20 nanometer geometries. UV-NIL applications with promising prospects include semiconductor, MOEMS, MEMS/NEMS and optoelectronic technologies.

“This toolset can be upgraded on any previously installed SUSS MA6 mask aligner with very limited effort,” the company says.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

NEW PRODUCTS

SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...
Automated thickness measurement system speeds production
09/20/2017ACU-THIK is an automated thickness measurement tool incorporating dual contact probes for high accuracy inspection of semiconductor wafers....
3D-Micromac launches the second generation of its high-performance microcell OTF laser systems
04/17/2017The high-performance production solution for Laser Contact Opening (LCO) of PERC solar cells achieves a th...