Applications of In-situ Sample Preparation and Modeling of SEM-STEM Imaging

Scanning transmission electron microscopy (STEM) with a scanning electron microscope (SEM) has become increasingly common in both SEM and dual-beam (SEM with focused ion beam) systems. This paper describes modeling that improves understanding of the contrasts seen in the various SEM-transmission modes and how the contrasts change with imaging conditions, such as sample thickness, electron beam voltage and different material parameters. Read about how this modeling can help interpret the contrast seen within the SEM-STEM images as well as optimize sample preparation and imaging conditions.

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