Cymer ships 75W LPP EUV tool to ASML

July 13, 2009 – Cymer says it has delivered the world’s first fully integrated laser produced plasma (LPP) EUV lithography source to ASML, to support integration and testing of next-gen EUV scanners. Cymer says the system achieves 75W of full-die exposure power, and will hit 100W “within the current quarter,” enabling 60 wafers/hr throughput for volume manufacturing.

In an LPP EUV lithography source, molten tin droplets are fired through a vacuum chamber and individually tracked and vaporized by a pulsed high power infrared laser, creating a high-temperature plasma point source which radiates 13.5nm wavelength light. A large mirror collects and directs this light into the scanner, where it is patterned by a photomask and projected onto a silicon wafer.

ASML is planning first shipments of its production-ready EUV tools (100 wafers/hr throughput) for “a year from now.” It claims to have orders for five EUV systems from memory and logic customers on three continents.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...
Radiant Vision Systems announces new automated visual inspection system
11/06/2017Radiant Vision Systems, a provider of high-resolution imaging solutions for automated visual analysis of devices and surfaces, an...
SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...