Semefab building new 150mm MEMS fab

December 3, 2009 – Scottish foundry Semefab says it is investing £6.6M (US $11M) in a new wafer fab for frontend processing of MEMS structures.

The CMOS3 site will house a 1200 m2 Class 100 cleanroom capable of fabricating 0.5μm structures; combined with the company’s existing MEMS2 fab, it will offer full 150mm wafer flow for integrating CMOS and MEMS technologies (a 4" flow is already operational). Official opening is slated for June 2010.

Construction is already ahead of schedule, with the structural steel mezzanine already completed, according to Ewing Thomson, project director of Merit Merrell Technology, which was contracted to handle cleanroom construction and equipment installation.

Funds for the new site come from capital investment from Scottish Enterprise and the Technology Strategy Board.


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