MEMS manufacturing rotary stages from Aerotech enable speed, accuracy

(September 29, 2010) — Aerotech is offering the ANT95-R and ANT130-R direct-drive rotary stages, which are part of the company’s nano Motion Technology product line. They offer in-position stability (0.005 arc sec) and incremental motion (0.01 arc sec) using the company’s direct-drive technology, and are good for demanding high-throughput manufacturing applications such as disk-drive andMEMS manufacture and test, fiber-optic device alignment, as well as for super-high-precision laboratory R&D applications.

 

The ANT95-R and ANT130-R rotary stages incorporate Aerotech’s direct-drive for extremely smooth motion, and both are available in 20°, 180°, or 360° continuous travel. Maximum speed is 200 rpm and maximum acceleration is 400 rad/s2. Axial load capacity is 2 kg for the ANT95-R and 3 kg for the ANT130-R. These rotary stages also offer an 11 mm clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.

The ANT95-R and ANT130-R series are designed for compatibility and easy integration with Aerotech’s ANT linear stages.

The ANT95-R and ANT130-R were designed to operate in a 24/7 manufacturing environment while providing laboratory-grade accuracy. Unlike other extremely precise rotary devices, they require no periodic maintenance.

For more information, visit www.aerotech.com

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