MEMS manufacturing rotary stages from Aerotech enable speed, accuracy

(September 29, 2010) — Aerotech is offering the ANT95-R and ANT130-R direct-drive rotary stages, which are part of the company’s nano Motion Technology product line. They offer in-position stability (0.005 arc sec) and incremental motion (0.01 arc sec) using the company’s direct-drive technology, and are good for demanding high-throughput manufacturing applications such as disk-drive andMEMS manufacture and test, fiber-optic device alignment, as well as for super-high-precision laboratory R&D applications.


The ANT95-R and ANT130-R rotary stages incorporate Aerotech’s direct-drive for extremely smooth motion, and both are available in 20°, 180°, or 360° continuous travel. Maximum speed is 200 rpm and maximum acceleration is 400 rad/s2. Axial load capacity is 2 kg for the ANT95-R and 3 kg for the ANT130-R. These rotary stages also offer an 11 mm clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.

The ANT95-R and ANT130-R series are designed for compatibility and easy integration with Aerotech’s ANT linear stages.

The ANT95-R and ANT130-R were designed to operate in a 24/7 manufacturing environment while providing laboratory-grade accuracy. Unlike other extremely precise rotary devices, they require no periodic maintenance.

For more information, visit

Follow Small Times on by clicking Or join our Facebook group


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>



Edwards launches new Smart Thermal Management System at SEMICON Europa 2016
10/25/2016Smart TMS helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by red...
Tektronix introduces Keithley S540 power semiconductor test system
10/19/2016Tektronix, Inc., a worldwide provider of measurement solutions, today introduced the Keithley S540 Power Semiconductor Test System, a ...
Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...