CMP-retaining-rings from Willbe use molded Victrex PEEK design

(November 23, 2010) – Willbe S&T, semiconductors and LCD parts maker, selected VICTREX PEEK polymer as the material in its chemical mechanical planarization (CMP) retaining rings. The unique design of Willbe S&T’s insert molded CMP ring provides better performance, longer life and reduced cost compared to traditional two-piece bonded type CMP retaining rings made with stainless steel and polyphenylene sulfide (PPS), the company reports.

Click to EnlargeThe use of VICTREX PEEK polymer has resulted in the lifetime of CMP retaining rings being increased by 50%-100% and increased CMP fabrication yields and cost reduction. The front and back of typical CMP rings may separate under high pressure and rotation, which can damage the wafer. However, such accidents are prevented with Willbe’s insert ring method that protects the metal with VICTREX PEEK polymer, preventing dust and separation of the two parts.

Slurry used for wafer planarization splatters and sticks on the surface of CMP retaining rings. There are fewer scratches on Willbe’s wafer surfaces because of the inherent lubricity of VICTREX PEEK polymer when compared to stainless steel. To help reduce costs, a hole is made in the ring’s side so that the slurry between the inner walls of the retaining ring and the membrane can be removed and the metal inside CMP retaining rings can be reused.

As a key stage in the fabrication and processing of semiconductor wafers, the CMP stage requires tight process management, tight tolerances, and high quality of surface topography and planarity. The importance of such requirements in the CMP stage is steadily increasing as electronics and related products become smaller every day. The trend toward narrower line widths on the wafer leads to high performance requirements of the property of retaining rings, which are a key part of CMP processing."

"VICTREX PEEK polymer has the best combination of material properties such as chemical resistance, heat resistance and electrical properties, optimal for making CMP retaining rings that have strict property requirements," said Sang Kook Shim, senior market development manager of Victrex Korea.

For more information, please visit the Victrex website at www.victrex.com.

Willbe S&T is Korea-based and specializes in the domestic processing and supply of cutting-edge semiconductors and LCD equipment parts. For more information, visit www.willbesnt.com

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