Edwards-expands-vacuum-pumps-for-wafer-fab-LCD-etch-solar-manufacturing

(December 3, 2010)Edwards, vacuum and abatement equipment and services provider, expanded its iXA family of magnetically-levitated turbomolecular pumps with the introduction of the STP-iXA2206 and STP-iXA3306 pumps. Developed for solar, glass coating, semiconductor and LCD etch applications, the iXA2206/iXA3306 pumps deliver better performance than earlier iXA-family pumps.

The new STP-iXA2206/iXA3306 are fully integrated vacuum pumps that are easier to install and offer a smaller footprint as an all-in-one vacuum product for all application tools, said Masahide Tanaka, senior product manager, TMP Business Division, Edwards Japan, Ltd.

Integration of an onboard controller eliminates control unit rack mounting and a connection cable between the pump and the control unit. Its compact design and size compatibility with previous models simplifies upgrades from existing pumps, reports Edwards.

The STP-iXA3306 has a maximum pumping speed of 3200 liters per second and improved throughput performance at high gas flows.

The STP-iXA2206 offers the same pumping speed of the earlier STP-A2203, yet the maximum throughput capability has been increased. It features the latest-generation small power supply, which has been incorporated into the onboard controller. It also includes a temperature management system option to minimize the formation of process-generated byproducts. The pump has a 5-axis magnetic bearing system and new motor and drive system with maintenance intervals as long as five years.

The STP-iXA Series is being showcased at the Edwards booth 4C-704 during SEMICON Japan, taking place December 1-3, 2010 at Makuhari Messe, Chiba, Japan. More SEMICON Japan products from Tegal, Applied Materials, and EVG.

For further information about Edwards, visit www.edwardsvacuum.com.

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