AMAT-darkfield-wafer-inspection-finds-40nm-particles-on-patterned-wafers

March 17, 2011Applied Materials Inc. (AMAT) debuted the Applied DFinder darkfield inspection system, which uses deep ultraviolet (DUV) laser scanning for particle sensitivity down to 40nm on patterned wafers.

The product suits inspecting the interconnect layers in 22nm and below memory and logic chips.

AMAT claims that the tool, designed specifically for interconnect inspection, provides a cost of ownership (COO) up to 40% lower than other darkfield systems.

The DFinder system’s exclusive DUV laser illumination technology enables the detection of all particles of interest at the 22nm node, down to 40nm in size, which AMAT reports is over 30% smaller than other darkfield systems. Its proprietary grazing-angle optical path and full polarization control effectively isolate particles from the pattern on production wafers, enabling it to find yield-limiting particles while producing an order of magnitude fewer "false alarm" and nuisance defects. Un-patterned test wafers are virtually unneccessary.

"We have already sold multiple systems and have repeat orders for volume production," said Ronen Benzion, vice president and general manager of Applied’s Process Diagnostics and Control business unit.

Applied Materials Inc. (Nasdaq:AMAT) provides equipment, services and software to enable the manufacture of advanced semiconductor, flat panel display and solar photovoltaic products. Learn more at www.appliedmaterials.com

Subscribe to Solid State Technology/Advanced Packaging.

Follow Solid State Technology on Twitter.com via editors Pete Singer, twitter.com/PetesTweetsPW and Debra Vogler, twitter.com/dvogler_PV_semi.

Or join our Facebook group

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

NEW PRODUCTS

Edwards launches new vacuum pumps at SEMICON China 2016
03/15/2016Edwards announced the availability of two new vacuum pump product families at SEMICON China: the iXM Series for semiconductor etch and chemical v...
Low-outgassing Faraday Isolators to improve lifetime and reliability of optical systems
02/18/2016Qioptiq, an Excelitas Technologies company introduces the LINOS Low-outgassing Faraday Isolators, the first of th...
Versatile high throughput SEM from JEOL
11/04/2015JEOL's new JSM-IT100 is the latest addition to its InTouchScope Series of Scanning Electron Microscopes....