March 21, 2011 — The Optogan Group, Germany-based LED manufacturer, placed a multi-system order for Oxford Instruments’ etch and deposition systems. These include PlasmaPro System133 ICP and PlasmaPro 800Plus RIE etch systems, and a PlasmaPro 800Plus deposition system.
The PlasmaPro System133 process tool offers up to 27 x 2" batch etch capability for GaN-on-sapphire wafers, while the PlasmaPro 800Plus tools are a flexible solution for plasma etching and deposition processes on large wafer batches of up to 43 x 2" wafers, in a compact footprint, open loading system.
The Optogan Group develops and produces high-brightness light emitting diodes (HB-LEDs) for global applications and ordered the systems for installation at its high-volume production manufacturing line in Landshut, Germany.
Optogan has operated an Oxford system for several years, and is now adding Oxford Instruments’ production systems for their large batch, high yield and high speed capabilities. Optogan cited high throughput, repeatability, and excellent local customer support as keys to the repeat order.
Oxford Instruments provides high technology tools and systems for industrial and research markets. It is listed on the London Stock Exchange (OXIG).
Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Its systems provide process solutions for nanometer-layer epitaxial growth of compound semiconductor material, etching of nanometer-sized features and the controlled growth of nanostructures. These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition and hydride vapor phase epitaxy.
The Optogan Group is one of the technology leaders in the manufacturing of light-emitting diodes (LEDs). Learn more at http://www.optogan.com