STMicro installs Heidelberg litho system for lab on chip development

April 7, 2011 — ST Microelectronics (NY: STM, STMicro) has installed a µPG101 from Heidelberg Instruments in the "More Than Moore" Research Labs in Agrate Brianza (Italy) to develop prototypes of new microfluidics devices for medical diagnostic, and lab-on-chip applications.

The µPG101 is an economical and easy to use Micro Pattern Generator for direct write applications as well as low-volume mask making. It can be used in rapid prototyping of 2D and 3D microstructures on substrates up to 4 by 4", and is capable of exposing high resolution designs with minimum features of 1µm and an address grid of 40nm.

STMicroelectronics supplies semiconductors for the industrial market, set-top box applications, and micro-electromechanical systems (MEMS) chips for portable and consumer devices, including game controllers and smart phones. ST’s process technology portfolio includes advanced CMOS (Complementary Metal Oxide Semiconductor) logic including embedded memory variants, mixed-signal, analog and power processes.

Heidelberg Instruments produces high-precision maskless lithography systems for direct writing and photomask production in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.

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