Piezoelectric deposition tech wins $3M investment, SolMateS plans MEMS fab equip penetration

May 5, 2011 — SolMateS received a $3 million investment for the final development phase of their piezoelectric thin film deposition machine, PiezoFlare 1200.

Click to EnlargePrivate equity funds Twente Technology Fund and Participatiemaatschappij Oost Nederland (East-Netherlands Holding Company) invested the capital on April 27, 2011. SolMateS will use the investment to accelerate product development and international expansion for its unique production system.

Piezoelectric layers are to be used in all kinds of miniaturized systems where precise actuation is needed: small motors, radio-frequency micro electromechanical system (RF MEMS) components, micro pumps, etc.

Wet processing is typically used for forming piezoelectric layers, but SolMateS claims that production price and quality cannot meet the high-volume electronic industry standards. 

PiezoFlare 1200 is an automated deposition system for PZT thin films on 6" or 8" wafers, based on pulsed laser deposition. It offers high-yield piezo performance and flexibility for customized PZT compositions. The technology enables high-volume reliable production for PZT thin film deposition.

SolMateS technology has been developed at the University of Twente, and can be used to make MEMS for next-generation mobile electronics, thin film actuators and medical devices.

SolMateS information is available online at www.solmates.nl

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