August 26, 2011 — The MEMS Industry Group (MIG) welcomed Frauhofer Institute for Silicon Technology (ISIT) to its membership. The research facility focuses on microelectronics and microsystems technology. Siconnex, which builds diverse MEMS fab equipment, also joined the association.
Fraunhofer ISIT operates a 3,000m2 cleanroom for microsystems research and production, sporting Rudolph and SPTS equipment, among others. The staff includes 150 scientists, along with industry partners. They develop power electronics, sensors and microsystems based on micro electro mechanical systems (MEMS), as well as actuators using micro mirrors, valves, etc. Visit Fraunhofer ISIT’s website at http://www.isit.fraunhofer.de/en/ (English language version). The facility joins Fraunhofer IPMS and Fraunhofer ENAS, existing MIG members.
Siconnex Customized Solutions, based in Austria, supplies MEMS manufacturers with coating and deposition systems, metal lift off (MLO) tools, and wet batch sprayers for etch and clean operations. Learn more at http://www.siconnex.com/
MEMS Industry Group offers programs and events to advance MEMS commercialization and manufacturing in global markets. Members include MEMS makers such as Knowles, equipment suppliers such as Applied Materials, and research organizations such as imec. Learn more at www.memsindustrygroup.com.
Recent Fraunhofer MEMS research:
- Fraunhofer MEMS enable Vuzix video glasses goal
- Electroless NiAu on thinned wafers
- Gas-based etch for MEMS fab