Laser micromachining system eliminates lithography in MEMS prototyping

August 3, 2011 – PRNewswire — Resonetics introduces the RapidX250 laser micromachining system for micro electro mechanical system (MEMS), microfluidics, and medical device fabrication. The rapid prototyping tool best suits university research.

The system’s tolerances are nearly 1µm. The multi-wavelength excimer laser (193nm and 248nm) directly fabricates micro electronic structures in one step, eschewing traditional lithography processes.

The RapidX250 micro fabricates 2D sheets and tubes and 3D balloons or non-planar surfaces. Structures can be formed in XYZ, theta and goniometer. At 193nm, the laser can ablate fluropolymers (nylon, pebax, Teflon), bioabsorbable polymers, and glass. A quick exchange system allows users to switch to 248nm to machine polymers, ceramic and metals (such as stents). A DXF file-to-CNC converter is included for a multi-user environment.

Resonetics provides laser micromachining products and services, comprising The Medical Division, The Laser Micromachining Division (for Contract Manufacturing Services) and The Laser Systems Division (for capital equipment). Learn more at www.resonetics.com

Subscribe to our MEMS Direct newsletter

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>

NEW PRODUCTS

Thin wafer processing temporary bonding adhesive film for 3D wafer integration
03/24/2015 AI Technology, Inc (AIT) is the first known provider of a film format high temperature temporary bonding adhesive for thi...
Dramatic results achieved in cleaving glass using ultra-short pulsed lasers
03/11/2015ROFIN-SINAR, Inc. introduces the SmartCleave FI laser process and the MPS glass handling system for high speed and precise cl...
MKS introduces the Cirrus 3-XD Atmospheric gas analysis system
03/10/2015MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the Cirru...