Laser micromachining system eliminates lithography in MEMS prototyping

August 3, 2011 – PRNewswire — Resonetics introduces the RapidX250 laser micromachining system for micro electro mechanical system (MEMS), microfluidics, and medical device fabrication. The rapid prototyping tool best suits university research.

The system’s tolerances are nearly 1µm. The multi-wavelength excimer laser (193nm and 248nm) directly fabricates micro electronic structures in one step, eschewing traditional lithography processes.

The RapidX250 micro fabricates 2D sheets and tubes and 3D balloons or non-planar surfaces. Structures can be formed in XYZ, theta and goniometer. At 193nm, the laser can ablate fluropolymers (nylon, pebax, Teflon), bioabsorbable polymers, and glass. A quick exchange system allows users to switch to 248nm to machine polymers, ceramic and metals (such as stents). A DXF file-to-CNC converter is included for a multi-user environment.

Resonetics provides laser micromachining products and services, comprising The Medical Division, The Laser Micromachining Division (for Contract Manufacturing Services) and The Laser Systems Division (for capital equipment). Learn more at

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