Mass flow controller from Brooks Instrument gains safer delivery

September 12, 2011 — Flow products provider Brooks Instrument launched a new Safe Delivery System (SDS) option for its GF120 mass flow controllers. The GF120 SDS is a low-pressure drop mass flow controller that delivers sub-atmospheric SDS gases used in implant and etch processes.

Sub-atmosphereic SDS gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources. Most mass flow controllers require a 50Torr differential pressure at flow rates of 5sccm; however, with that pressure drop, only about 65% of the dopant can be extracted. The GF120 SDS low-pressure operation enables a further 30% of the dopant to be extracted. This drives significant cost-savings in SDS gases and equipment.

The GF120 SDS models may also be used in other challenging applications that require low pressure drop. These devices are available in full-scale flow ranges from 4sccm to 1slpm.

Brooks Instrument LLC provides advanced flow, pressure, vacuum, and level solutions. For more information, visit www.BrooksInstrument.com.

Subscribe to Solid State Technology

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>

NEW PRODUCTS

VaporSorb filter line protects advanced yield production from Entegris
10/21/2014Entegris, Inc. today announced a new product for its VaporSorb line of airborne molecular contamination (AMC) filters. ...
Next-generation nanoimprint lithography technology
10/21/2014EV Group (EVG) today introduced its SmartNIL large-area nanoimprint lithography (NIL) process....
SEMI-GAS broadens gas mixing capabilities for highly corrosive gases
08/28/2014SEMI-GAS Systems, a provider of ultra-high purity gas delivery equipment, recently broadened the capabilities of its custom Xturion ...