SEMATECH names lithography director

September 28, 2011 — SEMATECH appointed Dr. Stefan Wurm as the consortium’s director of lithography, responsible for the strategic direction of SEMATECH’s Lithography program, particularly worldwide EUV infrastructure development.

Dr. Wurm, a GLOBALFOUNDRIES assignee, previously served as the associate director of lithography at SEMATECH. He joined SEMATECH’s International 300mm Initiative (I300I) in the 1990s, responsible for 300mm metrology tool equipment demonstrations. He’s also managed the consortium’s extreme ultraviolet (EUV) program. Wurm is a principal member of technical staff at GLOBALFOUNDRIES Technology Development Group and has held positions with Advanced Micro Devices, Siemens Semiconductor Group, Infineon, and Qimonda.

Dr. Wurm holds a doctorate in physics and natural sciences from the Technische Universit

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