Fraunhofer micro-scanner MEMS eval kit now configurable online

January 6, 2012 — Fraunhofer Institute for Photonic Microsystems IPMS has placed its Light Deflection Cube (LDC) evaluation kit custom-configuration and ordering on the Internet. The LDC is used to evaluate single-axis micro electro mechanical system (MEMS) scanning mirrors.

Light Deflection Cube (LDC): custom-configurable evaluation kit for single-axis MEMS scanning mirrors.

Light deflection over an axis is used in barcode reading, laser image projection, and 3D object measurement. Silicon resonant micromirrors are 0.5-3.0mm in diameter and suitable for mass production. These micro-scanners enable compact, energy-efficient, robust, affordable light-delection products.

Also read: Microvision’s MEMS scanning mirror proves shock-resistant

Micro-scanner-based products are limited due to time-consuming and costly complex MEMS development, noted Denis Jung, project manager at Fraunhofer IPMS. "Integration of the micro-scanners, position detection and drive electronics in the system environment can pose a hurdle."

Microscanner construction set VarioS – the online path to individually tailored microscanners.

By selling the LCD custom-configurable Evaluation Kit on the internet, Fraunhofer IPMS hopes to bring microscanner MEMS development in step with perpetually shorter product cycles. The encapsulated LDC kit is based on a standardized, configurable VarioS MEMS mirror and includes a position sensor, complete drive electronics, and software interface to specify the operating parameters. The circular mirror plate of the micro scanning mirror in the LDC module can be 0.5-3.0mm in diameter.

Inquiries about an LDC should be input at The website offers the user a configuration and ordering tool to specify the dimensions of the mirror plate, scan angle, scan frequency, and dynamic flatness of the mirror plate if neccessary. The software checks and lists the configurations that are technically possible and from which the user can select the chip type and batch size for a quote.

The Fraunhofer Institute for Photonic Microsystems IPMS focuses development and production services on the practical industrial application of unique technologicalknow-how in the fields of micro (optical) electro mechanical systems (MEMS, MOEMS). Learn more at

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