Vistec installs first e-beam lithography EBPG5000pES in China

January 16, 2012 — Wuhan National Laboratory for Optoelectronics (WNLO) at the Huazhong University of Science and Technology (HUST) in Wuhan, China, has signed off its Vistec Lithography B.V. electron-beam lithography (e-beam litho) system Vistec EBPG5000pES.

The Vistec EBPG5000pES electron-beam lithography system will be used for photonics and optoelectronics research and development, applied with application support and service from Vistec, stated Prof. Jinsong Xia, director of the Optoelectronic Micro & Nano Fabrication and Characterization Facility (OMFC) at WNLO.

Also read: Vistec wins electron beam lithography system order from Sabanci U Istanbul and ETH Zurich adds Vistec EBPG5200 to nanotechnology center

The Vistec EBPG5000pES offers a flexible electron-optical column and high-brightness TFE source, allowing 50 and 100kV operation, a spot size down to <2.2nm, and creation of nano-lithography structures <8nm. The system incorporates an interactive graphical user interface (GUI) that will be beneficial in the multi-user university environment.

"The electron beam lithography system at WNLO is the first operational Vistec EBPG5000pES in the P.R. China, which opens great opportunities to a sustainable business development for Vistec in that region," said Erwin Mueller, Managing Director Vistec Lithography, B.V.

Wuhan National Laboratory for Optoelectronics (WNLO), co-established by the Ministry of Education, Hubei Provincial Government and Wuhan Municipal Government, is a national laboratory authorized by the Ministry of Science and Technology of the PRC. The Laboratory is managed by Huazhong University of Science and Technology (HUST) and in collaboration with Wuhan Research Institute of Posts and Telecommunications (WRI), Wuhan Institute of Physics and Mathematics (WIPM) affiliated to the Chinese Academy of Sciences (CAS) and Huazhong Institute of Optoelectronic Technology (HIOT). Website:

HUST is a dynamic university enjoying rapid growth. The research-based university maintains close ties with business and industry. It boasts one of China’s five national labs — Wuhan National Laboratory for Optoelectronics (WNLO) — and one of the twelve national scientific facilities — the Pulsed High Magnetic Filed Center (PHMFC). It is home to more than ten state-level scientific research platforms. Internet:

The Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electron-beam lithography systems. The Vistec Electron Beam Lithography Group combines Vistec Electron Beam and Vistec Lithography. Learn more at

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