AIXTRON deposition tools installed at graphene research lab in Italy

February 23, 2012 — AIXTRON SE sold 2 BM Pro, formerly known as Black Magic, 4"-wafer deposition tools to the Italian Institute of Technology (IIT) in Pisa, Italy, for the development and production of graphene used in novel hydrogen storage systems.

IIT Pisa will use 1 system to deposit graphene via chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD). The second BM Pro system is configured for high-temperature (1800°C) processing, forming graphene with sublimation. We were seeking highly uniform, reproducible thin films, said Dr Camilla Coletti at IIT, as well as flexibility in deposition, spanning CVD, PECVD, and sublimation. The tools will form the basis of IIT’s research on graphene film synthesis for nanoelectronics and energy storage devices.

The local AIXTRON support team installed and commissioned each system at the Power Nanosystems Laboratory, IIT Pisa’s Center for Nanotechnology Innovation, at Laboratorio NEST of Scuola Normale Superiore (IIT@NEST).

IIT@NEST is an interdisciplinary research and development center studying fundamental phenomena on a nanoscale and exploiting nanomaterials through innovative devices.

AIXTRON provides manufacturing equipment for microelectronics companies in light-emitting diode (LED), semiconductor, and related industries. Learn more about AIXTRON at


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>



Edwards launches new Smart Thermal Management System at SEMICON Europa 2016
10/25/2016Smart TMS helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by red...
Tektronix introduces Keithley S540 power semiconductor test system
10/19/2016Tektronix, Inc., a worldwide provider of measurement solutions, today introduced the Keithley S540 Power Semiconductor Test System, a ...
Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...