Brewer Science, Pixelligent debut hardmask for advanced semiconductor lithography

February 13, 2012 – Marketwire — Nanocrystal additive developer Pixelligent and semiconductor fab supplier Brewer Science Inc. developed a spin-on hardmask technology for advanced lithography, combining nanocrystal and microelectronic coating technologies. The hardmask debuts after 2 years of collaboration, with support from NIST under an $8M Technology Innovation Program award.

The hardmask incorporates Pixelligent’s nanocrystal and dispersion technologies with Brewer Science’s polymer technology. The hardmask reportedly improves the lithography process window, significantly reduces line collapse, improves etch selectivity, and offers broad resist compatibility.

Pixelligent produces 2-5nm-diameter, high-purity metal oxide nanocrystals that are stably dispersed in organic media. Brewer Science noticed that Pixelligent’s manufacturing process consistently yields a narrow particle size distribution, said Tony Flaim, CTO of Brewer Science, adding that the companies will continue to collaborate.

When commercialized, the hardmask will be available in Brewer Science’s OptiStack system of lithography products.

Pixelligent Technologies LLC manufactures high-quality nanocrystal additives and polymer nanocomposites for the electronics, industrial, and military markets. Its Zirconia and Hafnia nanocrystals are used to magnify the optical, electronic, thermal, and mechanical properties of numerous polymer systems. Learn more at www.pixelligent.com.

Brewer Science makes specialty materials, equipment, and process solutions for applications in semiconductors, advanced packaging/3-D ICs, MEMS, sensors, displays, LEDs, and printed electronics. Learn more: www.brewerscience.com.

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