ACUTRONIC MEMS testers enable economical test at the fab

March 19, 2012 — ACUTRONIC released standard, off-the-shelf 2-axis rate tables to test several micro electro mechanical system (MEMS) devices simultaneously. The 21-series is an economical version of the company’s highly customized high-end systems and is primarily made for MEMS manufacturers.

The 21-series tests small inertial measurement units (IMU) or other MEMS sensors. The testers mechanically stimulate MEMS for calibration and performance verification.

An integrated motion controller allows precise measurement and closed-loop control of position, rate, and acceleration. The controller supports a subset of the industry-standard ACUTRONIC Command Language (ACL) for communicating with a host computer.

Suiting use at the MEMS fab, the rate and position tables are designed to handle larger production volumes and integrate easily into the production line.

The 21-series comes in five standard configurations for testing devices used in commercial, medical, industrial, and ground transportation applications.

Access product data at

View recent issues of the MEMS Direct newsletter


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>



Edwards launches new Smart Thermal Management System at SEMICON Europa 2016
10/25/2016Smart TMS helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by red...
Tektronix introduces Keithley S540 power semiconductor test system
10/19/2016Tektronix, Inc., a worldwide provider of measurement solutions, today introduced the Keithley S540 Power Semiconductor Test System, a ...
Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...