RASIRC wet thermal oxidation cuts oxide film fab time

March 13, 2012 — Steam purification company RASIRC determined that a new wet thermal oxidation process on a RASIRC Steamer enables 87% better wafer throughput than dry oxidation of uniform thin oxides.

The study was conducted by RASIRC customer WRS Materials, comparing growth rate and uniformity of 1000 angstrom oxide film on 300mm wafers. The tests used a 400mm furnace to grow 1000 angrstrom oxide films. "300mm oxide wafers are needed by both OEMs for test and end users for products," said Richard Mee, president and COO, WRS Materials.

The RASIRC Steamer, which has closed loop flow control, was used to purify and deliver 50 liters of steam per minute. WRS found that the oxidation process step can be reduced from 100 minutes to 13 minutes while still meeting uniformity requirements.

3000 and 5000 angstrom films are typically grown with steam, noted Jeffrey Spiegelman, RASIRC founder and president. Moving 1,000 angstrom processes from dry oxidation to steam enables high uniformity with lower costs due to higher throughput, and higher volume production.

The report is available at http://www.RASIRC.com/regpages/papers.php?nn=ThinOxide

RASIRC products deliver ultrapure water vapor for semiconductor, photovoltaics, nanotechnology and other manufacturing applications. Visit: www.rasirc.com

Subscribe to Solid State Technology


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Edwards launches new vacuum pumps at SEMICON China 2016
03/15/2016Edwards announced the availability of two new vacuum pump product families at SEMICON China: the iXM Series for semiconductor etch and chemical v...
Low-outgassing Faraday Isolators to improve lifetime and reliability of optical systems
02/18/2016Qioptiq, an Excelitas Technologies company introduces the LINOS Low-outgassing Faraday Isolators, the first of th...
Versatile high throughput SEM from JEOL
11/04/2015JEOL's new JSM-IT100 is the latest addition to its InTouchScope Series of Scanning Electron Microscopes....