RASIRC wet thermal oxidation cuts oxide film fab time

March 13, 2012 — Steam purification company RASIRC determined that a new wet thermal oxidation process on a RASIRC Steamer enables 87% better wafer throughput than dry oxidation of uniform thin oxides.

The study was conducted by RASIRC customer WRS Materials, comparing growth rate and uniformity of 1000 angstrom oxide film on 300mm wafers. The tests used a 400mm furnace to grow 1000 angrstrom oxide films. "300mm oxide wafers are needed by both OEMs for test and end users for products," said Richard Mee, president and COO, WRS Materials.

The RASIRC Steamer, which has closed loop flow control, was used to purify and deliver 50 liters of steam per minute. WRS found that the oxidation process step can be reduced from 100 minutes to 13 minutes while still meeting uniformity requirements.

3000 and 5000 angstrom films are typically grown with steam, noted Jeffrey Spiegelman, RASIRC founder and president. Moving 1,000 angstrom processes from dry oxidation to steam enables high uniformity with lower costs due to higher throughput, and higher volume production.

The report is available at http://www.RASIRC.com/regpages/papers.php?nn=ThinOxide

RASIRC products deliver ultrapure water vapor for semiconductor, photovoltaics, nanotechnology and other manufacturing applications. Visit: www.rasirc.com

Subscribe to Solid State Technology

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>

NEW PRODUCTS

MEMS wafer inspection system from Sonoscan
06/25/2014Sonoscan has announced its AW322 200 fully automated system for ultrasonic inspection of MEMS wafers....
Radiant Zemax announces ProMetric Y series compact imaging photometers
06/18/2014Radiant Zemax, a provider of light and color test and measurement systems, announces the release of the ProMetric Y line of imagin...
Chad Industries will demonstrate world-class flexible automated wafer handling for 450mm wafers at SEMICON West 2014
06/12/2014Chad Industries, owned by Jabil Circuit, Inc., announced today that it will demonstr...