SUSS buys Tamarack for lithography, laser structuring lines

March 30, 2012 — Semiconductor fab equipment supplier SUSS MicroTec has acquired Tamarack Scientific Co. Inc. in a share purchase of $9.34 million, plus an additional variable earn-out component which depends on the development of revenues for the next 3 financial years.

Tamarack makes ultraviolet (UV) projection lithography tools and laser micro-structuring systems for manufacturing 3D semiconductor packages, micro electro mechanical systems (MEMS), and light-emitting diodes (LEDs). Laser processing tools include excimer and solid state; photolithography tools include proximity and projection.

Tamarack products are installed from R&D facilities to high-volume manufacturing plants. The company in based in the US, with an applications lab, cleanroom, and short-run manufacturing support in addition to its capital equipment offering.

The acquired intellectual property (IP) complements SUSS’s exposure technology portfolio with projection lithography. The additional core technology and product line for back-end semiconductor lithography gives SUSS a range of price/performance offerings for customers, said Frank P. Averdung, president and CEO of S


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