Semiconductor foundry integrates Nova metrology for CMP at various nodes

April 4, 2012 – PRNewswire — Metrology tool supplier Nova Measuring Instruments Ltd. (NASDAQ:NVMI) will provide the production tools of record (PTOR) performing chemical mechanical polishing (CMP) metrology at a leading semiconductor foundry.

This is the foundry’s first implementation of an integrated metrology solution in production. They performed a proof of concept evaluation, finding improvement in production yields and return on investment (ROI). The initial order for multiple tools will be delivered over Q1 and Q2.

The foundry is currently a customer of Nova’s advanced stand-alone metrology tools and MARS modeling software for semiconductor production in various technology nodes, at different process steps.

The integrated metrology platform adoption will lead to more business as the foundry extends its integrated metrology deployment in current and future nodes, said Gabi Seligsohn, president and CEO of Nova.

Nova Measuring Instruments Ltd. makes advanced integrated and stand-alone metrology tools for the semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE under the symbol NVMI. Website: http://www.nova.co.il.

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