CEA-Leti unveils wide-reaching silicon research scope

May 2, 2012 — CEA-Leti has introduced the “LETI-3S” concept, for “Silicon Specialty Solutions.” The research is oriented to start-ups, component integrators, fabless or fablite chip companies, and equipment/consumable suppliers. Other potential partners include foundries, research centers with a limited processes offer, micro and nanotechnologies companies that do not want low-volume activities, and high-value silicon wafer suppliers.

3S addresses deposition; front side/back side clean, wet etch, and strip; lithography with dual side alignment capability; etching, implant, epitaxy, diffusion; chemical mechanical polishing (CMP), bonding, grinding, dicing; and advanced in-line metrology.

LETI-3S will operate on the Minatec Campus in Grenoble on 24/7 200mm and 300mm wafer platforms in its 8,000-m² state-of-the-art clean rooms. Smaller wafer sizes will also be available thanks to an innovative holder technology. LETI-3S can provide substrates or work on customer wafers, pre-processed or not, under stringent contamination protocols.

LETI-3S ensures a full traceability from process flow conception to product delivery. SPC, FMEA, audits or conformance certificates to specifications are available according to the type of inquiry.

Laurent Malier, CEO of CEA-Leti, said LETI-3S offers “simple access to [CEA-Leti’s] resources.” He expects the program will significantly enlarge Leti’s panel of industrial partners in different sectors. CEA-Leti currently hosts 200 assignees from partner companies.

CEA is a French research and technology organization, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. Visit www.leti.fr.

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