DFMSim wins 1st metrology integration for its lithography software

June 28, 2012 — Semiconductor software solutions provider DFMSim announced a distribution agreement with a leading US process control original equipment manufacturer (OEM) that involves the integration of DFMSim’s SMARTlitho manufacturing software into new tools for advanced metrology.

SMARTlitho comprises 3 tools to characterize lithography-related process data: SMARToverlay and SMARTcd [Critical Dimension] for on-line analysis, and SMARTmodeler for off-line process analysis. DFMSim’s products enable semiconductor manufacturers to find and avoid systemic defects in wafer processing.

The partnership is DFMSim’s first deal with a metrology leader. The company has similar engagements with other players in the IC design-to-manufacturing ecosystem, including a recent installation of SMARTyield at a development foundry in the US.   

“Few technologies can influence cost savings in a fab more dramatically than process control,” said DFMSim chief executive officer, Anantha Sethuraman.  “And nowhere is process control more valuable than lithography

DFMSim executives will be present at SEMICON West 2012 in San Francisco, July 10-12 at the Moscone Center in San Francisco, CA.

To learn more about SMARTlitho manufacturing software, please visit www.dfmsim.com.

Visit the Semiconductors Channel of Solid State Technology!


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...
Radiant Vision Systems announces new automated visual inspection system
11/06/2017Radiant Vision Systems, a provider of high-resolution imaging solutions for automated visual analysis of devices and surfaces, an...
SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...