DFMSim wins 1st metrology integration for its lithography software

June 28, 2012 — Semiconductor software solutions provider DFMSim announced a distribution agreement with a leading US process control original equipment manufacturer (OEM) that involves the integration of DFMSim’s SMARTlitho manufacturing software into new tools for advanced metrology.

SMARTlitho comprises 3 tools to characterize lithography-related process data: SMARToverlay and SMARTcd [Critical Dimension] for on-line analysis, and SMARTmodeler for off-line process analysis. DFMSim’s products enable semiconductor manufacturers to find and avoid systemic defects in wafer processing.

The partnership is DFMSim’s first deal with a metrology leader. The company has similar engagements with other players in the IC design-to-manufacturing ecosystem, including a recent installation of SMARTyield at a development foundry in the US.   

“Few technologies can influence cost savings in a fab more dramatically than process control,” said DFMSim chief executive officer, Anantha Sethuraman.  “And nowhere is process control more valuable than lithography

DFMSim executives will be present at SEMICON West 2012 in San Francisco, July 10-12 at the Moscone Center in San Francisco, CA.

To learn more about SMARTlitho manufacturing software, please visit www.dfmsim.com.

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