MEMS researchers at UToronto purchase plasma etch tool from Oxford Instruments

June 19, 2012 — Plasma etch and deposition processing system maker Oxford Instruments Plasma Technology won an order for its recently launched PlasmaPro Estrelas100 deep silicon etch tool from the University of Toronto.

The PlasmaPro Estrelas100 deep silicon etch tool offers flexibility for R&D uses. It forms nano and micro structures via Bosch and cryo etch technologies in the same chamber. It performs smooth sidewall processes and high-etch-rate cavity etches without changing the chamber hardware.

UToronto will use the system in its Emerging Communications Technology Institute (ECTI) in the central micro- and nanofabrication facility, serving academic research and development needs, as well as training functions. Professor Yu Sun, Director of ECTI, cited the PlasmaPro Estrelas100’s equipment quality, performance and capabilities, as well as system support.

The PlasmaPro Estrelas100 will be used for collaborative research with strategic partners in key research areas, including nanotechnology and nanofabrication, photonic materials and devices, micro- and nano-electromechanical systems (M/NEMS), biotechnology, micro- and nano-electronic devices, integrated optics, and photovoltaic devices.

The Canada Foundation for Innovation (CFI) funded the purchase and commissioning of important tools including deep reactive ion etch (DRIE) and other tools for the Centre for Microfluidic Systems in Chemistry and Biology.

Oxford Instruments provides high-technology tools and systems for research and industry. The company designs and manufactures equipment that can fabricate, analyze and manipulate matter at the atomic and molecular level. Learn more at www.oxford-instruments.com.

Visit the MEMS Channel of Solid State Technology, and subscribe to our MEMS Direct e-newsletter!

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <strike> <strong>

NEW PRODUCTS

SEMI-GAS broadens gas mixing capabilities for highly corrosive gases
08/28/2014SEMI-GAS Systems, a provider of ultra-high purity gas delivery equipment, recently broadened the capabilities of its custom Xturion ...
Entegris announces GateKeeper GPS platform
07/15/2014Entegris, Inc., announced last week the launch of GateKeeper GPS, its next-generation of automated regeneration gas purification system (GPS) technology....
Bruker introduces Inspire nanoscale chemical mapping system
07/15/2014Bruker today announced the release of Inspire, the first integrated scanning probe microscopy (SPM) infrared system for 10-nanometer spatial...