July 20, 2012 — Micro electro mechanical systems (MEMS) must be characterized during device development. Polytec asserts that advanced optical measurement techniques are necessary for characterization, as electrical tests can check functionality, but not all physical properties.
Polytec has released a white paper on the topic: “Optical Measurement Techniques for Dynamic Characterization of MEMS Devices.” It details the state-of-the-art optical measurement capabilities available for full field dynamic response and surface topography measurements of MEMS devices.
One capability that Polytec offers, laser Doppler vibrometry, enables real-time dynamic response measurements with resolution down to the picometer level and frequency bandwidth to 24MHz. The white paper details characterization studies that exemplify use of this technology for micro mirror array, pressure sensor, cantilever beam and accelerometer MEMS designs.
Download the full paper at: http://www.polytec.com/int/applications/micro-nano-technology/