Semiconductor foundry installs Mattson etch tool

July 25, 2012 – Marketwire — Mattson Technology, Inc. (NASDAQ:MTSN), semiconductor processing equipment maker, installed its paradigmE etch system at a major semiconductor foundry.

The tool uses Mattson’s proprietary Faraday-Shielded inductively coupled plasma (ICP) source technology, along with bias capability for anisotropic etching of 300mm wafers. Mattson also offers high-throughput wafer transfer platforms for the etch step. The newest generation, paradigmE Si, debuted at SEMICON West 2011.

Also read: Solvent-free plasma removal of etch polymers from STMicroelectronics and Mattson

The paradigmE etch system order marks the third fab to install the tool. The paradigmE etch system is now in production in foundry/logic, memory and CMOS image sensor fabs across multiple regions, including China, Korea and Taiwan.

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. Internet: www.mattson.com.

Visit the Semiconductors Channel of Solid State Technology!

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...
Pfeiffer Vacuum introduces HiPace 2800 turbopump for ion implantation applications
07/06/2016Pfeiffer Vacuum has introduced the HiPace 2800 IT turbopump that is designed for ion implantation applications....
NanoFocus AG introduces new inspection system for semiconductors industry
05/31/2016NanoFocus AG, the developer and manufacturer of optical 3D surface measuring technology, introduces the new measuring system µ...