AIXTRON tool supports OTFT, OLED, other organic electronics manufacturing

August 9, 2012 — AIXTRON launched the PRODOS-200 PVPD system for deposition of organic thin film materials, used to make organic thin-film transistor (OTFT) displays, organic light-emitting diodes (OLEDs) and other manufacturing applications.

The system supports research on new deposition processes for polymer thin films and easy transfer to industrial processes with high deposition rates, high contour conformity of the deposited layers, and unrestricted scalability based on AIXTRON’s Close Coupled Showerhead technology.

AIXTRON expects adopters to develop new conductive and flexible layers, manipulate surface properties, and create flexible barrier layers, as well as improving today’s deposition processes and structures. The PRODOS line is designed to be modular and expandable for source materials in liquid, gaseous, or solid forms. It supports various PVPD processes, or all-dry processes, in which the carrier gas-based, gas phase deposition is used for the in-situ polymerization and layer formation of functional polymer thin films.

The tools accommodate substrates up to 200mm2. They can be integrated into cluster environments by means of relevant SEMI-compatible interfaces and are compatible with other AIXTRON systems, such as the OVPD* R&D line. The double-wall-chamber construction makes the system eases maintenance and enables fast modifications.

AIXTRON also recently announced that its BM II (2-inch) system is being used for research on depositing carbon nanotube (CNT) arrays for 3D devices, such as nano-antennas and nano-rectifiers by Daegu Gyeongbuk Institute of Science & Technology (DGIST) in South Korea.

*OVPD technology has been exclusively licensed to AIXTRON from Universal Display Corporation (UDC) for equipment manufacture. OVPD technology is based on an invention by Professor Stephen R. Forrest et al. at Princeton University, which was exclusively licensed to UDC. AIXTRON and UDC have jointly developed and qualified OVPD pre-production equipment.

AIXTRON provides MOCVD production technologies for semiconductor devices, such as LEDs, lasers, transistors and solar cells. For further information on AIXTRON (FSE: AIXA, ISIN DE000A0WMPJ6, DE000A1MMEF7; NASDAQ: AIXG, ISIN US0096061041), see

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