August 30, 2012 - Matheson, Basking Ridge, NJ, a supplier of specialty gases and related equipment has acquired a majority stake in RASIRC, which makes liquid/gas purification and delivery systems (particularly water vapor). Terms of the deal were not disclosed.
More liquid chemicals and precursors are being used in advanced technology nodes of semiconductor manufacturing, noted William J. Kroll, chairman/CEO of Matheson, in a statement. Thus, RASIRC and its membrane technology "offers significant synergy not only to our existing line of purification products, but also to our high-purity material business," he stated
Jeffrey Spiegelman, RASIRC founder and president, cited the addition of Matheson’s global infrastructure, logistics, and R&D which will create size and stability to support customers "through a complete product adoption cycle — from bench top testing, to pilot line, and high volume." He added that the company will continue to develop new products for in-situ chemical generation of ultra-high purity vapors from liquid chemical sources.