Laser diode researchers order Oxford Instruments ion beam depo tool

August 23, 2012 — Optoelectronics researchers at the Ferdinand-Braun-Institut (FBH) ordered an Optofab3000 for Laser Bar Facet Coating from Oxford Instruments Plasma Technology. The advanced ion beam deposition (IBD) tool will deposit high-quality optical thin films for high-power and high-brightness laser diodes (LDs) at 0.63-1.12µm wavelengths, based on III-V semiconductor layer structures.

Photo 1. An Optofab3000 ion beam tool.

The tool offered both high-quality deposition and an advanced in-situ optical monitor, said Dr. Götz Erbert, head of the Optoelectronics Department at FBH. The tool can also achieve R&D tasks as well as pilot production, which the institute performs in some cases.

Photo 2. Inside an Optofab3000.

The Optofab3000 ion beam tool is scheduled to be delivered by the end of 2012.

Learn more at

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