Rubicon orders Zeta 300 optical profilers for sapphire LED substrates

August 6, 2012 — Zeta Instruments Inc. will install multiple optical profilers for micron-scale surface analysis at sapphire substrate maker Rubicon Technology Inc. (Nasdaq:RBCN). Rubicon is using the Zeta 300 series optical profilers for metrology and inspection on its sapphire substrates and wafer production aimed at the high-brightness light-emitting diodes (HB-LED) market.

Zeta’s 300 series high-precision metrology systems are designed to address the stringent specifications of the patterned sapphire substrate (PSS) market, enabling higher yields and lower wafer scrap at LED makers. One system performs detailed measurement of PSS structure dimensions and wafer defect inspection. It offered the best combination of speed and accuracy for Rubicon’s production-environment metrology needs, said Raja M. Parvez, president and CEO of Rubicon Technology.

Also read: Technology and cost considerations for high-volume HBLED lithography

The Zeta-300 series leverages Zeta’s Z-Dot technology to deliver high repeatability and accuracy for the measurement of LED-patterned/etched substrates, photo-resist and stacked structures on transparent surfaces. Coupled with application-specific software and a companion automated wafer handler, the Zeta-380 provides imaging and measurement capabilities superior to those of laser confocal microscopes.  The Zeta-380 measures and detects defects falling outside the industry certification levels that may not be detected by competing offerings.

Rubicon Technology, Inc. is an advanced electronic materials provider that is engaged in developing, manufacturing and selling monocrystalline sapphire and other crystalline products for light-emitting diodes (LEDs), radio frequency integrated circuits (RFICs), blue laser diodes, optoelectronics and other optical applications.

Zeta Instruments provides optical profiler systems that enable manufacturers of microfluidics/biotechnology, high-brightness LEDs, solar cells, and magnetic storage media to improve yields and process control. To learn more about Zeta Instruments, please visit

Visit the LED Manufacturing Channel on Solid State Technology and subscribe to the LED Manufacturing News monthly e-newsletter!


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>



OEM Group expands P5000 capabilities to compound semiconductor substrates
05/25/2017OEM Group has launched the P5000:CS automated single wafer cluster tool for the compound semiconductor market. ...
3D-Micromac launches the second generation of its high-performance microcell OTF laser systems
04/17/2017The high-performance production solution for Laser Contact Opening (LCO) of PERC solar cells achieves a th...
ULVAC launches NA-1500 dry etching system for 600mm advanced packaging systems
03/24/2017ULVAC, Inc. is pleased to announce the NA-1500 dry etching system for 600mm advanced packaging substrates, providing for u...