IEDM 2012 slideshow 07

Hybrid-channel ETSOI CMOS

CMOS technology uses the two types of MOSFET transistors (N and P) working together in a complementary fashion: when one is on, the other is off. However, the conflicting materials and design requirements for N- and P-type devices make achieving balanced performance and desired threshold voltage challenging. Meanwhile, extremely thin SOI (ETSOI) technology is a viable device architecture for continued CMOS scaling to 22nm and beyond, offering superior short-channel control and low device variability with undoped channels.

At IEDM, a team led by IBM will report on the world’s first high-performance hybrid-channel ETSOI CMOS device. They integrated a PFET having a thin, uniform strained SiGe channel, with an NFET having a Si channel, at 22nm geometries. A novel STI-last (isolation-last) process makes the hybrid architecture possible. The researchers built a ring oscillator circuit to benchmark performance, and the hybrid planar devices enabled the fastest ring oscillator ever reported, with a delay of only 11.2ps/stage at 0.7V, even better than FinFETs. (#18.1: "High-Performance Extremely Thin SOI (ETSOI) Hybrid CMOS with Si Channel NFET and Strained SiGe Channel PFET")

 

A wrap FG cell (left) and a planar FG cell (right).

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