Simulation for integrated MEMS
Scientists from Japan (U. of Tokyo, NTT Advanced Technology, Tokyo Institute) have developed "a handy simulation tool" for integrated microelectromechanical systems (MEMS) on a spice-based circuit simulator (LTspice). As long as one has analytical models for electromechanical components such as electrostatic parallel-plate actuator, viscoelastic spring, and mechanical anchor, "any multiphysics model for MEMS can be interpreted by using behavioral current or voltage sources. Simulation capability was extended to and tested against an electrostatic digital torsion mirror device integrated with CMOS level shifter circuits. (#6.3: A Multi-Physics Simulation Technique for Integrated MEMS" [Invited])
Schematic model of MEMS electrostatic digital torsion mirror array integrated with a high-voltage driver circuit. The mirror deflects downward when the drive voltage is supplied. High-voltage (>20V) level shifter is used to drive the mirror at fast speed and to a relatively large angle.