IEDM 2012 slideshow 13

Vertical graphene contacts for thermal TSV

Researchers from AIST in Japan will discuss how thermal conductivity of dense vertical and horizontal graphene (DVHG) was improved by forming vertical graphene contacts for thermal TSV. Thermal and electrical conductivity were improved by a factor of 10 and 100, respectively. The pyrolytic graphite with vertical graphene contacts showed a thermal conductivity of 1426 W/mK. (#33.5: "Improved Thermal Conductivity by Vertical Graphene Contact Formation for Thermal TSV")

 

SEM image of a nanowire resonator (2.3μm × 65nm × 45nm). Electromechanical coupling is achieved through ~60nm flexible airgap capacitors. The nanowire resonates in-plane.

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