Infinite Graphics (IGI), a supplier of service and software products for the Medium Area Mask (MAM) market, has added new capability in the form of new and upgraded equipment. IGI added a Heidelberg Volume Pattern Generator (VPG), a large area lithography system. The technology offers substrates up to 800 x 800mm, structures down to 0.8µm and an address grid down to 20nm. The company also upgraded two direct write laser imaging systems bringing the total to four imaging systems in Minneapolis and two in Singapore.
“To offer quicker turn with smaller features, smaller defects and cleaner masks, we also purchased two additional Automatic Optical Inspection (AOI) systems giving us a total of five inspection systems in Minneapolis and another semiconductor quality MAM cleaner,” said Clifford Stritch, Infinite Graphics Incorporated’s CEO. “These new systems will find sub-micron defects on masks to 14” and one micron defects on larger masks to 24” x 32”. The AOI can inspect to CAD data, compare die to die or inspect to design rules.”
Design and manufacturing solutions provided by IGI include precision imaging on film, glass and custom flat or curved substrates, 3D microstructures, industry renowned data clean-up, phototooling software and custom turnkey systems. IGI targets electronics, biological and MOEMs markets.