TSMC to unveil 16nm FinFET platform at IEDM

At the International Electron Devices Meeting (IEDM) in December, TSMC researchers will unveil a 16nm FinFET process that by many measures is one of the world’s most advanced semiconductor technologies.

 

In size, it is the first integrated technology platform to be announced below the 20 nm node, with key features including a 48-nm fin  pitch and the smallest SRAM ever incorporated into an integrated process—a 128-Mb SRAM measuring 0.07 µm2 per bit. In performance, it demonstrated either a 35% speed gain or a 55% power reduction over TSMC’s existing 28-nm high-k/metal gate planar process, itself a highly advanced technology, and had twice the transistor density.  Short-channel effects were well-controlled, with DIBL <30 mV/V, saturation current of 520/525 µA/µm at 0.75V (NMOS and PMOS, respectively) and off-current of 30 pA/µm. It incorporates seven levels of high-density copper/low k interconnect and high-density planar MIM devices for noise control.

Figure 1 shows that the 16 nm FinFET achieved either a >35% speed gain or >55% power reduction over TSMC’s planar process.

Figure 1 shows that the 16 nm FinFET achieved either a >35% speed gain or >55% power reduction over TSMC’s planar process.

 

Figure 2 shows a cross-section of the device’s 7-level metal copper/low-k architecture.

Figure 2 shows a cross-section of the device’s 7-level metal copper/low-k architecture.

 

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

One thought on “TSMC to unveil 16nm FinFET platform at IEDM

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Edwards launches new Smart Thermal Management System at SEMICON Europa 2016
10/25/2016Smart TMS helps semiconductor, flat panel display and solar manufacturers improve their process performance and safety by red...
Tektronix introduces Keithley S540 power semiconductor test system
10/19/2016Tektronix, Inc., a worldwide provider of measurement solutions, today introduced the Keithley S540 Power Semiconductor Test System, a ...
Novel Wafer Analyzer for up to 300mm wafer using high speed Raman Imaging Technology
08/08/2016Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market a...